Tan, T.D. and Anh, N.T. (2011) Three-axis piezoresistive accelerometer with uniform axial sensitivities. In: 2011 2nd International Conference on Intelligent Systems, Modelling and Simulation, ISMS 2011, 24 January 2011 through 28 January 2011, Phnom Penh.
Three-axis piezoresistive accelerometer with uniform axial sensitivities.pdf
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Abstract
A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure. © 2011 IEEE.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Divisions: | Faculties > Faculty of Physical and Chemical Engineering |
| Identification Number: | 10.1109/ISMS.2011.66 |
| Uncontrolled Keywords: | Cross-axis sensitivity; High sensitivity; Microelectromechanical-systems technologies; Piezoresistance; Piezoresistive accelerometers; Proof mass; Resonant frequencies; Simulation; Three axes; Three-axis; Three-dimensional sensor; Acceleration measurement; Accelerometers; Intelligent systems; MEMS; Microelectromechanical devices; Natural frequencies; Sensors; Composite micromechanics |
| Additional Information: | Conference code: 84500. Language of original document: English. |
| URI: | http://eprints.lqdtu.edu.vn/id/eprint/10154 |
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