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A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers

Nguyen, V.B. and Gubanova, L.A. and Bui, D.B.D.B. (2019) A method for improving the accuracy of an extinction coefficient measurement of weakly absorbing interference layers. In: Modeling Aspects in Optical Metrology VII 2019, 24 June 2019 through 26 June 2019.

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Abstract

A method of measuring the dimensionless extinction coefficient for optical thin-film layers of weakly absorbing filmforming materials using a parallelepiped form attachment is presented. The attachment uses frustrated total internal reflection to multiply radiation losses in tested thin film layers. Influences of some main factors on accuracy of the method have been studied and the results show that those influences can be compensated and as the result of it the measurement error can be reduced to 1%. © 2019 SPIE.

Item Type: Conference or Workshop Item (Paper)
Divisions: Faculties > Faculty of Special Equipments
Identification Number: 10.1117/12.2525068
Uncontrolled Keywords: Light transmission; Refractive index; Thin films; Extinction coefficients; Film-forming materials; Frustrated total internal reflections; Optical thin films; Radiation loss; Thin film layers; Thin-film measurement; Optical films
Additional Information: Conference code: 151666. Language of original document: English.
URI: http://eprints.lqdtu.edu.vn/id/eprint/9432

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