LE QUY DON
Technical University
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Article

Vanthanh, K. and Ma, Y.-C. and Si, J.-H. and Chen, T. and Chen, F. and Hou, X. (2014) Fabrication of micro-grooves in silicon carbide using femtosecond laser irradiation and acid etching. Chinese Physics Letters, 31 (3): 37901. ISSN 0256307X

Khuat, V. and Ma, Y. and Si, J. and Chen, T. and Chen, F. and Hou, X. (2014) Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching. Applied Surface Science, 289. pp. 529-532. ISSN 1694332 Fulltext available

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