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Nguyen, D.T. and Pham, P.H. and Hoang, K.T. (2023) Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process. Microelectronics International.

Hoang, K.T. and Vu, H.C. and Nguyen, V.H. and Pham, P.H. (2019) Influence of the driving frequency on electrostatic linear comb actuator displacement amplitude. In: Lecture Notes in Networks and Systems. Springer, pp. 380-389.