LE QUY DON
Technical University
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Vanthanh, K. and Ma, Y.-C. and Si, J.-H. and Chen, T. and Chen, F. and Hou, X. (2014) Fabrication of micro-grooves in silicon carbide using femtosecond laser irradiation and acid etching. Chinese Physics Letters, 31 (3): 37901. ISSN 0256307X

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