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Nguyen, D.T. and Pham, P.H. and Hoang, K.T. (2023) Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process. Microelectronics International.
Nguyen, D.T. and Pham, P.H. and Hoang, K.T. (2023) Improving displacement of silicon V-shaped electrothermal microactuator using platinum sputter deposition process. Microelectronics International.