Vanthanh, K. and Ma, Y.-C. and Si, J.-H. and Chen, T. and Chen, F. and Hou, X. (2014) Fabrication of micro-grooves in silicon carbide using femtosecond laser irradiation and acid etching. Chinese Physics Letters, 31 (3): 37901. ISSN 0256307X
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A simple method using an 800-nm femtosecond laser and chemical selective etching is developed for fabrication of high-aspect-ratio grooves in silicon carbide. Micro grooves with an aspect ratio of approximately 40 are obtained. The morphology and chemical compositions of the grooves are analyzed using a scanning electronic microscope equipped with an energy dispersive x-ray spectroscopy. The formation mechanism of SiC grooves is attributed to the chemical reactions of the laser induced structural changes with a mixed solution of hydrofluoric acid and nitric acid. In addition, the effects of laser irradiation parameters on the aspect ratio of the grooves are investigated. © 2014 Chinese Physical Society and IOP Publishing Ltd.
| Item Type: | Article |
|---|---|
| Divisions: | Faculties > Faculty of Information Technology |
| Identification Number: | 10.1088/0256-307X/31/3/037901 |
| Additional Information: | Language of original document: English. |
| URI: | http://eprints.lqdtu.edu.vn/id/eprint/10023 |
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