Influence of angular acceleration on the dynamic response of the proof mass in the MEMS vibratory gyroscope model

The paper studies the influence of the parameters of the rotational motion on the resonant frequency in the mechanical structure of the MEMS vibratory gyroscope (MVG). This working frequency is the important parameter impacting the quality factor of the MVGs. The result shows that the angular velocity impacts significantly the resonant frequency of the mechanical system in MVG. The frequencies reduce 57 when increasing angular velocity 7 times while there is little influence of the angular acceleration on it. The driving and sensing frequency of the mechanical system is almost stable with the variability of angular acceleration. Therefore, in cases of higher resonant frequencies than the parameters of rotational motion, they can be neglected in the expression describing the working frequency of the MVGs. © 2022, The Author(s), under exclusive licence to The Brazilian Society of Mechanical Sciences and Engineering.