Study on the influence of manufacturing tolerance of the spring beam on the sensitivity of the two-axis MEMS accelerometer

Microelectromechanical systems (MEMS)—based sensor technologies play a crucial role in determining the future of smart sensing applications because of their small size, low energy consumption, and cost-effectiveness. When developing two-dimensional sensors, effectively controlling cross-axis sensitivity is a crucial consideration. Cross-axis error arises when a sensor, designed to function along a certain axis, unintentionally perceives signals or effects from orthogonal axes. This problem emerges as a result of manufacturing errors or design processing. This work presents a novel design for a two-dimensional sensor and investigates the impact of vibrations in various directions on the sensor’s sensitivity to motions along different axes. The aim of the study is to examine the influence of manufacturing defects in the spring beam on the sensitivity to movements in other axes. The computations are performed using a blend of theoretical methodologies and computational approaches using MATLAB software. The study's findings indicate that manufacturing faults have a substantial impact on cross-axis sensitivity. © The Author(s), under exclusive licence to Springer-Verlag France SAS, part of Springer Nature 2024.