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Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm

Phan, N.N. and Le, H.H. and Duong, D.C. (2019) Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm. Optical Engineering, 58 (12): 124105. ISSN 913286

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Abstract

We present a technique for measuring the microlens radius of curvature (ROC). The technique is based on the principle of three-dimensional (3-D) surface topography using a white light interference microscope. By measuring 3-D point clouds of the surface combined with fitting the measured data to an ideal sphere, the radius of the surface is determined. We take advantage of the fast speed of the maximum intensity method and the anti-interference capability of the fitting method of fringe analysis techniques in white-light interferometry to measure the 3-D topography of the microlens array surface. To measure each microlens's ROC, we use the fast geometric fit algorithm for sphere where the input data are the spherical surface point cloud. We have built a white light interference microscope and experimentally measured the geometric parameter and the surface curvature of some microlens of a commercial microlens array. Our measurement results of the ROC, the surface height, and the diameter of microlens showed a good agreement with the results obtained using the Alpha-Step D-500 stylus profiler and the values reported by the manufacturer, indicating the applicability of this technique. © 2019 Society of Photo-Optical Instrumentation Engineers (SPIE).

Item Type: Article
Divisions: Faculties > Faculty of Special Equipments
Identification Number: 10.1117/1.OE.58.12.124105
Uncontrolled Keywords: Fiber optic sensors; Interferometry; Light interference; Microlenses; Optical instrument lenses; Spheres; Surface topography; Topography; Maximum intensities; Optical Metrology; Radius measurements; Radius of curvature; Three-dimensional surface; Threedimensional (3-d); White light interference; White-light interferometry; Microscopes
Additional Information: Language of original document: English.
URI: http://eprints.lqdtu.edu.vn/id/eprint/9212

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