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Influence of the driving frequency on electrostatic linear comb actuator displacement amplitude

Hoang, K.T. and Vu, H.C. and Nguyen, V.H. and Pham, P.H. (2019) Influence of the driving frequency on electrostatic linear comb actuator displacement amplitude. In: Lecture Notes in Networks and Systems. Springer, pp. 380-389.

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Abstract

This paper focuses on the change of displacement of Electrostatic Linear Comb Actuator (ELCA) while considering the influence of a driving frequency. A new method for determining the equivalent dynamic parameters such as stiffness, vibrating mass, and air damping factor in motion direction of shuttle (i.e. in y-direction) is proposed, thence establishing and solving the differential motion equation of shuttle aims to achieve a typical displacement formula. Theoretical and simulation results show that the ELCA works stably in the range of frequency from 1 to 24 Hz with displacement amplitude error of 10% and driving voltage is a square wave. Moreover, the range of driving frequency for the ELCA can be extended up to 1 kHz with displacement amplitude error of 10% and the shape of driving voltage is a harmonic sine wave function. © 2019, Springer Nature Switzerland AG.

Item Type: Book Section
Divisions: Faculties > Faculty of Mechanical Engineering
Identification Number: 10.1007/978-3-030-04792-4_50
Additional Information: Language of original document: English.
URI: http://eprints.lqdtu.edu.vn/id/eprint/9452

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