Dang, L.T. and Dang, T.H. and Nguyen, T.T.T. and Nguyen, T.T. and Nguyen, H.M. and Nguyen, T.V. and Nguyen, H.Q. (2017) Thermoelectric Micro-Refrigerator Based on Bismuth/Antimony Telluride. Journal of Electronic Materials, 46 (6). pp. 3660-3666. ISSN 3615235
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Abstract
Thermoelectric micro-coolers based on bismuth telluride (Bi2Te3) and antimony telluride (Sb2Te3) are important in many practical applications thanks to their compactness and fluid-free circulation. In this paper, we studied thermoelectric properties of bismuth/antimony telluride (Bi/SbTe) thin films prepared by the thermal co-evaporation method, which yielded among the best thermoelectric quality. Different co-evaporation conditions such as deposition flux ratio of materials and substrate temperature during deposition were investigated to optimize the thermoelectric figure␣of merit of these materials. Micron-size refrigerators were designed and fabricated using standard lithography and etching technique. A three-layer structure was introduced, including a p-type layer, an n-type layer and an aluminum layer. Next to the main cooler, a pair of smaller Bi/SbTe junctions was used as a thermocouple to directly measure electron temperature of the main device. Etching properties of the thermoelectric materials were investigated and optimized to support the fabrication process of the micro-refrigerator. We discuss our results and address possible applications. © 2017, The Minerals, Metals & Materials Society.
Item Type: | Article |
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Divisions: | Faculties > Faculty of Physical and Chemical Engineering |
Identification Number: | 10.1007/s11664-017-5343-x |
Uncontrolled Keywords: | Bismuth; Cooling systems; Deposition; Etching; Evaporation; Microfabrication; Refrigerators; Structure (composition); Thermocouples; Thermoelectricity; Co-evaporation conditions; Micro-device; Microcoolers; Standard lithographies; Thermal co-evaporation; Thermo-Electric materials; Thermoelectric properties; Three-layer structures; Thermoelectric equipment |
Additional Information: | Language of original document: English. |
URI: | http://eprints.lqdtu.edu.vn/id/eprint/9720 |