Khuat, V. and Chen, T. and Gao, B. and Si, J. and Ma, Y. and Hou, X. (2014) Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching. Applied Physics Letters, 104 (24): 241907. ISSN 36951
Uniform nano-ripples on the sidewall of silicon carbide micro-hole fabricated by femtosecond laser irradiation and acid etching.pdf
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Abstract
Uniform nano-ripples were observed on the sidewall of micro-holes in silicon carbide fabricated by 800-nm femtosecond laser and chemical selective etching. The morphology of the ripple was analyzed using scanning electronic microscopy. The formation mechanism of the micro-holes was attributed to the chemical reaction of the laser affected zone with mixed solution of hydrofluoric acid and nitric acid. The formation of nano-ripples on the sidewall of the holes could be attributed to the standing wave generated in z direction due to the interference between the incident wave and the reflected wave. © 2014 AIP Publishing LLC.
| Item Type: | Article |
|---|---|
| Divisions: | Faculties > Faculty of Information Technology |
| Identification Number: | 10.1063/1.4883880 |
| Uncontrolled Keywords: | Etching; Fabrication; Hydrofluoric acid; Silicon carbide; Formation mechanism; Incident waves; Mixed solution; Reflected waves; Scanning electronic microscopy; Selective etching; Standing wave; Z-directions; Femtosecond lasers |
| Additional Information: | Language of original document: English. |
| URI: | http://eprints.lqdtu.edu.vn/id/eprint/9977 |
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